Polymers for microelectronics - resists and dielectrics
- Författare
- American Chemical Society American Chemical Society Seiichi Tagawa C. Grant Wilson Larry F. Thompson
- (Larry F. Thompson, editor, C. Grant Wilson, editor, Seiichi Tagawa, editor., "Developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering, Inc., of the American Chemical Society at the 203rd Meeting of the American Chemical Society, San Francisco, California, April 5-10, 1992")
- Genre
- Konferenser, Ej skönlitteratur, Konferenspublikation
- Språk
- Engelska
| Förlag | År | Ort | Om boken | ISBN |
|---|---|---|---|---|
| American Chemical Society | 1994 | USA, Washington | xii, 571 sidor. ill. |